Focus Webinar | Semiconductor Series: Part 3

Imagining a More Sustainable CMP and p-CMP Future

Balancing performance, defect control, and environmental impact through surface science


In this section, we will examine how surface science tools can help guide the development of more sustainable CMP and post-CMP cleaning processes. The discussion will center on how greener chemistries can be evaluated not only by their environmental benefits, but also by their ability to maintain strong surface performance, effective cleaning, and low defectivity.

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Register now for this live webinar hosted by Dr. Jason Keleher (Lewis University, Keleher Research Group) to learn about the breakthrough research he and his team are performing in the semiconductor space!

The DSA100W can be used to compare how sustainable formulations affect wettability, spreading, and surface energy, helping determine whether greener alternatives still provide the interfacial behavior needed for effective polishing and cleaning. The DFA100 can also be used to assess foamability, bubble stability, and fluid characteristics, which are important when screening formulations for practical use, consistency, and reduced chemical waste.

What you will learn

  • How surface science can support the design of more sustainable CMP and p-CMP chemistries
  • How the DSA100W can be used to compare wettability and surface energy across conventional and greener formulations
  • How the DFA100 can help evaluate foam and bubble behavior when screening sustainable chemistries
  • How to balance environmental goals with polishing performance, cleaning efficiency, and defect control

Webinar series

  • Part 1: Engineering Surface Reactions in CMP
    How modified chemistries control surface interactions to enhance performance

  • Part 2: Understanding Particle Removal Efficiency (PRE)
    How substrate surface characteristics influence removal mechanisms in p-CMP cleaning

  • Part 3: Imagining a More Sustainable CMP and p-CMP Future
    Balancing performance, defect control, and environmental impact through surface science

Speaker

Dr Jason Keleher 1200x1200

Dr. Jason J. Keleher is Full Professor and Chair of Chemistry at Lewis University, where he leads the Keleher Research Group (KRG), focusing on engineered nanoparticles, hybrid materials, surface interactions, and sustainable technologies. Prior to academia, he held research positions at Komag and Cabot Microelectronics (now Entegris), earning the company's Inventor of the Year award for his contributions to surface chemistry and product development. An award-winning educator and advocate for diversity in STEM, Dr. Keleher has co-authored more than 50 peer-reviewed publications, been awarded 25 U.S. patents, and delivered over 500 technical presentations worldwide.

Live Webinar

Register for our live webinar with Dr. Jason Keleher to learn how surface science tools can help guide the development of more sustainable CMP and post-CMP cleaning processes.

➤ Date: Wednesday, September 16, 2026

➤ Time: 10 am CDT | 5 pm CEST | 3 pm UTC

Can't make the date? Register to receive the recording after the webinar.

 

Register now for the webinar

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